Product Introduction

It can be divided into the scattered light with the parallel light system, scattered light system by the chimney internal reflection mirror, intermediate reflector, outside mirror structure, quasi square in 33 degrees or so, can satisfy the requirement of 100 um line width line distance; Chimney only half a parallel light system using the reflector remove outside mirror and mirror, the reflection mirror structure changes make the right angle decreases below 20 degrees, improved lighting system to achieve 75um line spacing.